ACS-NPMpm Series
The NPMPM is a line of the most advanced servo drives available today.
It is specifically designed to address the most demanding applications with regards to move and settle times, standstill
jitter, and velocity smoothness, such as wafer metrology and inspection, FPD inspection, and ultra-precision machining
for processing of optical components.
It is based on the proprietary and unique NanoPWM technology that exceeds stand still jitter and tracking error performance that until now has been achieved only with linear drives, with reduced cost of ownership.
With the optional combination of a 10MHz laser encoder interface and the powerful ServoBoost algorithm, demanding
sub-nanometer resolution positioning systems can achieve ultimate throughput and accuracy with minimal sensitivity to
disturbances and stage to stage manufacturing differences.
The NPMPM is a slave that runs under any ACS EtherCAT masters.
A comprehensive set of software support tools are provided for module configuration, setup and tuning.
